Infrared and near-infrared spectroscopic probing of atomic layer deposition processes

Physics

• Atomic Layer Epitaxy 100%
• FTIR Spectroscopy 50%
• Laser Spectroscopy 50%
• Methane 50%
• Near Infrared 100%
• Reactor Dynamics 25%
• Semiconductor Laser 50%
• Vapor Phase 75%

Engineering

• Atomic Layer Deposition 100%
• Deposition Process 100%
• Deposition System 25%
• FTIR Spectroscopy 50%
• Gas-Phase 75%
• Methane 50%
• Reactor Dynamics 25%

Material Science

• Aluminum Oxide 50%
• Fourier Transform Infrared Spectroscopy 100%
• Laser Spectroscopy 100%
• Semiconductor Laser 100%
• Surface (Surface Science) 50%