Integrated array of avalanche photodiodes for single-photon counting

  • P. Zappa
  • , M. Ghioni
  • , S. Cova
  • , L. Varisco
  • , B. Sinnis
  • , A. Morrison
  • , A. Mathewson

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

The design and characterisation of arrays of single photon avalanche diodes (SPAD) is presented The performance of the devices make them suitable in many applications, like single-photon imaging for microelectronic investigation and fluorescence correlation spectroscopy. A new problem arising from the integration of SPADs is the optical crosstalk between adjacent pixels, due to the secondary photons emitted by an avalanching junction. This effect is quantitatively investigated and a trench isolation process is proposed for eliminating it and opening the way to the fabrication of monolithic 2-D matrix with parallel read-out.

Original languageEnglish
Title of host publicationEuropean Solid-State Device Research Conference
EditorsH. Grunbacher
PublisherIEEE Computer Society
Pages600-603
Number of pages4
ISBN (Electronic)2863322214
DOIs
Publication statusPublished - 1997
Externally publishedYes
Event27th European Solid-State Device Research Conference, ESSDERC 1997 - Stuttgart, Germany
Duration: 22 Sep 199724 Sep 1997

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Conference

Conference27th European Solid-State Device Research Conference, ESSDERC 1997
Country/TerritoryGermany
CityStuttgart
Period22/09/9724/09/97

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