Investigating Polycrystalline III-V Thin Films As Channel Materials for œAbove IC Logic and Memory Applications

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
JournalMeeting Abstracts
DOIs
Publication statusPublished - 2018

Keywords

  • Dopant
  • Materials science
  • Dopant Activation
  • Optoelectronics
  • Semiconductor
  • Annealing (glass)
  • Doping
  • Engineering physics
  • Nanotechnology
  • Transistor
  • Integrated circuit
  • Wafer
  • Electrical engineering
  • Voltage
  • Physics
  • Engineering
  • Composite material

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