Investigation into modelling power output for MEMS energy harvesting devices using COMSOL MultiphysicsR

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

A COMSOL MultiphysicsR model was created which provides accurate information on the resonant frequency, stress and power output of an ALN piezoelectric device. The maximum error in the resonant frequency was found to be 4%. The models accurately predicted the trend of the output power for external impedances as well as the matched impedance for maximum energy harvesting. The expected voltage and current output for 1g acceleration was also be modeled.

Original languageEnglish
Title of host publication2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
DOIs
Publication statusPublished - 2013
Event2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013 - Wroclaw, Poland
Duration: 14 Apr 201317 Apr 2013

Publication series

Name2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013

Conference

Conference2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2013
Country/TerritoryPoland
CityWroclaw
Period14/04/1317/04/13

Keywords

  • AlN
  • COMSOL
  • energy harvesting
  • piezoelectric

Fingerprint

Dive into the research topics of 'Investigation into modelling power output for MEMS energy harvesting devices using COMSOL MultiphysicsR'. Together they form a unique fingerprint.

Cite this