Investigation of the wet-etching mechanism of Ga-polar AlGaN/GaN micro-pillars

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@article{f28b447919e84b84963409286cda3b2a,

title = "Investigation of the wet-etching mechanism of Ga-polar AlGaN/GaN micro-pillars",

author = "Junjie Kang and Zhi Li and Zhiqiang Liu and Hongjian Li and Yongbing Zhao and Yingdong Tian and Ping Ma and Xiaoyan Yi and Guohong Wang",

year = "2014",

language = "English",

volume = "386",

pages = "175--178",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Investigation of the wet-etching mechanism of Ga-polar AlGaN/GaN micro-pillars

AU - Kang, Junjie

AU - Li, Zhi

AU - Liu, Zhiqiang

AU - Li, Hongjian

AU - Zhao, Yongbing

AU - Tian, Yingdong

AU - Ma, Ping

AU - Yi, Xiaoyan

AU - Wang, Guohong

PY - 2014

Y1 - 2014

M3 - Article

SN - 0022-0248

VL - 386

SP - 175

EP - 178

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

ER -