Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films
- M. Modreanu
- , Mariuca Gartner
- , N. Tomozeiu
- , J. Seekamp
- , P. Cosmin
- National Institute for Research and Development in Microtechnologies Romania
- Institute of Physical Chemistry, Romanian Academy of Sciences
- University of Bucharest
- Hamburg University of Technology
Research output: Contribution to journal › Article › peer-review