Kinetics of hydrogenation and interaction with oxygen in crystalline silicon
- G. Hahn
- , D. Karg
- , A. Schönecker
- , A. R. Burgers
- , R. Ginige
- , K. Cherkaoui
- University of Konstanz
- Friedrich-Alexander University Erlangen-Nürnberg
- Netherlands Organisation for Applied Scientific Research
Research output: Contribution to journal › Article › peer-review