@inproceedings{4b92d52893814a0dab2216b6d851b4bd,
title = "Large scale programmable photonic circuits using silicon photonic MEMS",
abstract = "We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits.",
author = "Umar Khan and Iman Zand and Pierre Edinger and Gaehun Jo and Bleiker, \{Simon J.\} and Takabayashi, \{Alain Yuji\} and Cleitus Antony and Junsu Lee and Malik, \{Arun Kumar\} and Peter Verheyen and Arce, \{Cristina Lerma\} and Tigers Jonuzi and Jan Watte and Niels Quack and Frank Niklaus and Gylfason, \{Kristinn B.\} and Wim Bogaerts",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2022, {\textcopyright} 2022 The Author(s); 2022 Conference on Lasers and Electro-Optics, CLEO 2022 ; Conference date: 15-05-2022 Through 20-05-2022",
year = "2022",
language = "English",
series = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings",
address = "United States",
}