Large stroke staggered vertical comb-drive actuator for the application of a millimeter-wave tunable phase shifter
- Yunjia Li
- , Dimitra Psychogiou
- , Stéphane Kühne
- , Jan Hesselbarth
- , Christian Hafner
- , Christofer Hierold
- Swiss Federal Institute of Technology Zurich
- Kistler Instrumente AG
- University of Stuttgart
Research output: Contribution to journal › Article › peer-review