Abstract
A three-steps laser micro-machined manufacturing technology (LMST) based in low-loss Alumina substrates is introduced and studied. As a consequence of this analysis, fabrication constraints are identified and design rules introduced in order to assist the conception of millimeter-wave passive devices for Q-band applications. Quality factor around 690 is measured at 42 GHz in resonators fabricated with this technology. Moreover, diverse devices are designed with the design rules proposed. Manufactured devices show good repeatability and balance between performance and size.
| Original language | English |
|---|---|
| Title of host publication | 2020 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9789463968003 |
| DOIs | |
| Publication status | Published - Aug 2020 |
| Externally published | Yes |
| Event | 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020 - Rome, Italy Duration: 29 Aug 2020 → 5 Sep 2020 |
Publication series
| Name | 2020 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020 |
|---|
Conference
| Conference | 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020 |
|---|---|
| Country/Territory | Italy |
| City | Rome |
| Period | 29/08/20 → 5/09/20 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
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