@inbook{ad1fde14b9de40878595022404a60d0b,
title = "Laser-machined substrate technology (LMST) for Q-band applications",
abstract = "A three-steps laser micro-machined manufacturing technology (LMST) based in low-loss Alumina substrates is introduced and studied. As a consequence of this analysis, fabrication constraints are identified and design rules introduced in order to assist the conception of millimeter-wave passive devices for Q-band applications. Quality factor around 690 is measured at 42 GHz in resonators fabricated with this technology. Moreover, diverse devices are designed with the design rules proposed. Manufactured devices show good repeatability and balance between performance and size.",
author = "A. Fontana and A. Perigaud and P. Richard and D. Carsenat and R. Elmostadi and N. Delhote",
note = "Publisher Copyright: {\textcopyright} 2020 URSI.; 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020 ; Conference date: 29-08-2020 Through 05-09-2020",
year = "2020",
month = aug,
doi = "10.23919/URSIGASS49373.2020.9232179",
language = "English",
series = "2020 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 33rd General Assembly and Scientific Symposium of the International Union of Radio Science, URSI GASS 2020",
address = "United States",
}
