Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
DOIs	https://doi.org/10.1116/1.3025910
Publication status	Published - 2009

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title = "Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors",

author = "Ailbe O'Manachain",

year = "2009",

doi = "10.1116/1.3025910",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",

}

TY - JOUR

T1 - Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors

AU - O'Manachain, Ailbe

PY - 2009

Y1 - 2009

U2 - 10.1116/1.3025910

DO - 10.1116/1.3025910

M3 - Article

JO - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

ER -