@article{ff00812800254ac5b64006d85a02833b,
title = "Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth",
author = "R. Lindsay and K. Henson and W. Vandervorst and K. Maex and Pawlak, \{B. J.\} and R. Duffy and R. Surdeanu and P. Stolk and Kittl, \{J. A.\} and S. Giangrandi and X. Pages and \{Van der Jeugd\}, K.",
year = "2004",
doi = "10.1116/1.1638774",
language = "English",
volume = "22",
pages = "306--311",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "1",
}