Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

R. Lindsay; K. Henson; W. Vandervorst; K. Maex; B. J. Pawlak; R. Duffy; R. Surdeanu; P. Stolk; J. A. Kittl; S. Giangrandi; X. Pages; K. Van der Jeugd

doi:10.1116/1.1638774

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

R. Lindsay
, K. Henson
, W. Vandervorst
, K. Maex
, B. J. Pawlak
, R. Duffy
, R. Surdeanu
, P. Stolk
, J. A. Kittl
, S. Giangrandi
, X. Pages
, K. Van der Jeugd

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	306-311
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	1
DOIs	https://doi.org/10.1116/1.1638774
Publication status	Published - 2004
Externally published	Yes

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Lindsay, R., Henson, K., Vandervorst, W., Maex, K., Pawlak, B. J., Duffy, R., Surdeanu, R., Stolk, P., Kittl, J. A., Giangrandi, S., Pages, X., & Van der Jeugd, K. (2004). Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22(1), 306-311. https://doi.org/10.1116/1.1638774

@article{ff00812800254ac5b64006d85a02833b,

title = "Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth",

author = "R. Lindsay and K. Henson and W. Vandervorst and K. Maex and Pawlak, \{B. J.\} and R. Duffy and R. Surdeanu and P. Stolk and Kittl, \{J. A.\} and S. Giangrandi and X. Pages and \{Van der Jeugd\}, K.",

year = "2004",

doi = "10.1116/1.1638774",

language = "English",

volume = "22",

pages = "306--311",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

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Lindsay, R, Henson, K, Vandervorst, W, Maex, K, Pawlak, BJ, Duffy, R, Surdeanu, R, Stolk, P, Kittl, JA, Giangrandi, S, Pages, X & Van der Jeugd, K 2004, 'Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 22, no. 1, pp. 306-311. https://doi.org/10.1116/1.1638774

TY - JOUR

T1 - Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

AU - Lindsay, R.

AU - Henson, K.

AU - Vandervorst, W.

AU - Maex, K.

AU - Pawlak, B. J.

AU - Duffy, R.

AU - Surdeanu, R.

AU - Stolk, P.

AU - Kittl, J. A.

AU - Giangrandi, S.

AU - Pages, X.

AU - Van der Jeugd, K.

PY - 2004

Y1 - 2004

UR - https://www.scopus.com/pages/publications/12144287923

U2 - 10.1116/1.1638774

DO - 10.1116/1.1638774

M3 - Article

AN - SCOPUS:12144287923

SN - 1071-1023

VL - 22

SP - 306

EP - 311

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 1

ER -

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

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