Low resistivity electrical contacting of porous n-type GaN layers due to reduced workfunction intermetallic seed layers

  • Oleksandr V. Bilousov
  • , Joan J. Carvajal
  • , Colm O'Dwyer
  • , Xavier Mateos
  • , Francesc Díaz
  • , Magdalena Aguiló

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

Porous GaN crystals have been grown on Pt- and Au- coated silicon substrates as porous crystals and as porous layers. By the direct reaction of metallic Ga and NH3 gas in a CVD system, intermetallic metal-Ga alloys formed at the interface allow the seeding and growth of porous GaN by vapor-solid-solid processes. Current-voltage and capacitance-voltage measurements confirm that the intermetallic seed layers result in near-ohmic contacts to porous n-GaN with low contact resistivities.

Original languageEnglish
Title of host publicationGallium Nitride Materials and Devices VIII
DOIs
Publication statusPublished - 2013
EventSPIE Symposium on Gallium Nitride Materials and Devices VIII - San Francisco, CA, United States
Duration: 4 Feb 20137 Feb 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8625
ISSN (Print)0277-786X

Conference

ConferenceSPIE Symposium on Gallium Nitride Materials and Devices VIII
Country/TerritoryUnited States
CitySan Francisco, CA
Period4/02/137/02/13

Keywords

  • Ohmic electron transport
  • Porous GaN

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