@inbook{bc0574862c174909af65c8a8f685ff22,
title = " Low-Voltage Phase Shifters Based on Hf x Zr 1-x O 2 Ferroelectrics Integrated with Phased Antenna Arrays ",
abstract = " In this paper, we present the design, fabrication and microwave experimental characterisation of a ferroelectric phase shifter, which is integrated with a 2-element antenna array to achieve beam-steering capabilities at very low voltages of pm mathbf\{1 V\}. The phase shifter consists of an interdigitated metallic capacitor deposited on a Zr-doped ferroelectric hafnium dioxide (Hf x Zr 1-x O 2 ) thin film, directly grown on high-resistivity Silicon (HR Si). The phase shifter shows a maximum phase shift of 53.74° at 2.55 GHz, sweeping the DC voltage between -1 V and +1 V. The miniaturised phased array is in the form of two gold patch antennas, phase shifters and additional circuitry, all integrated on HfxZr 1-x O 2 /HR Si 4-inch wafer. The radiation beam at 2.55 GHz is steered with 25° when the 7-nm-thick ferroelectric is biased with pm mathbf\{1 V\}. These new microwave devices represent a step forward in the realisation of low-voltage tunable microwave components for the upcoming 5G technology.",
keywords = "ferroelectric films, Phased arrays, thin film devices",
author = "M. Dragoman and M. Aldrigo and S. Iordanescu and M. Modreanu and I. Povey and D. Vasilache and A. Dinescu and C. Romanitan",
note = "Publisher Copyright: {\textcopyright} 2018 European Microwave Association.; 48th European Microwave Conference, EuMC 2018 ; Conference date: 25-09-2018 Through 27-09-2018",
year = "2018",
month = nov,
day = "20",
doi = "10.23919/EuMC.2018.8541592",
language = "English",
series = "2018 48th European Microwave Conference, EuMC 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "950--953",
booktitle = "2018 48th European Microwave Conference, EuMC 2018",
address = "United States",
}