Mechanisms of pyrolysis of organometallic deposition precursors

  • Iain M.T. Davidson
  • , Andrew M. Ellis
  • , Graham P. Mills
  • , Mark Pennington
  • , Ian M. Povey
  • , J. Barrie Raynor
  • , Douglas K. Russell
  • , Sinan Saydam
  • , Andrew D. Workman

Research output: Contribution to journalArticlepeer-review

Abstract

The gas-phase pyrolysis mechanisms of a number of potential transition-metal deposition precursors have been investigated using the techniques of: (i) infrared laser powered homogeneous pyrolysis coupled with product identification by FTIR, NMR and GC-MS; (ii) stirred Flow Reactor kinetic measurements; (iii) EPR spectroscopy of matrix-isolated free radicals. Preliminary results are presented for: (a) MeMn(CO)5 and AcMn(CO)5, both alone and in the presence of Me3SiH; (b) C5H5Mn(CO)3 and MeC5H 4Mn(CO)3; (c) C4H8Fe(CO) 3; and (d) (C5H5)2Fe, all of which provide clear evidence that purely homogeneous pathways can be very different from those of surface-catalysed decomposition.

Original languageEnglish
Pages (from-to)13-17
Number of pages5
JournalJournal of Materials Chemistry
Volume4
Issue number1
DOIs
Publication statusPublished - 1994
Externally publishedYes

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