@inproceedings{38fbe92ec9df4503a3822528e1c78f0f,
title = "MEMS-tunable silicon-integrated cavity filters",
abstract = "Millimeter-wave (mm-wave) frequencies (>30 GHz) are more and more occupied by new sets of applications ranging from high-data rate communication networks to security and surveillance systems. As a result, the demand for highly-versatile RF filters that are able to operate at such high frequencies and accommodate the needs of these systems is continuously increasing. A new class of mm-wave filters that are structured by silicon-integrated evanescent-mode cavity resonators and MEMS corrugated diaphragms have recently being proposed as a prospective candidate for these applications. This paper provides a general review of the attributes of this technology and its RF performance merits through various filter demonstration examples.",
keywords = "Evanescent-mode filters, high-Q, MEMS, millimeter-waves, RF filters, RF MEMS, silicon cavities",
author = "Dimitrios Peroulis and Dimitra Psychogiou",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 16th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2016 ; Conference date: 24-01-2016 Through 27-01-2016",
year = "2016",
month = mar,
day = "31",
doi = "10.1109/SIRF.2016.7445460",
language = "English",
series = "SiRF 2016 - 2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "31--34",
booktitle = "SiRF 2016 - 2016 IEEE 16th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems",
address = "United States",
}