@inbook{dfcfe06ac4d94f65a38cc90829c98eb1,
title = "Micro-transfer-printing for heterogeneous integration",
abstract = "Micro-transfer-printing is a key enabling technology for the heterogeneous integration of different materials and devices. The technique is particularly applicable to photonics where a typical system requires diverse arrays of components.",
author = "B. Corbett and Z. Li and K. Buehler and F. Naumann and U. Krieger and S. Wicht and Bower, \{C. A.\}",
note = "Publisher Copyright: {\textcopyright} 2019 JSPS 191st Committee on Innovative Interface Bonding Technology.; 6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019 ; Conference date: 21-05-2019 Through 25-05-2019",
year = "2019",
month = may,
doi = "10.23919/LTB-3D.2019.8735381",
language = "English",
series = "Proceedings of 2019 6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "34",
booktitle = "Proceedings of 2019 6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019",
address = "United States",
}