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Microfabricated coupled inductors for integrated power converters

  • Satish Prabhakaran
  • , Terence O'Donnell
  • , Charles R. Sullivan
  • , Magali Brunet
  • , Saibal Roy
  • , Cian O'Mathuna
  • Dartmouth College

Research output: Contribution to journalArticlepeer-review

Abstract

A microfabricated coupled inductor for low-voltage, high-current power converters is presented. The aim is to miniaturize such converters and improve their transient response using high-performance microfabricated inductors. These inductors have high power density enabled by a high-flux-density magnetic material (NiFe) and have the potential for integration with silicon circuits. A four-phase magnetically coupled structure with 14 nH of inductance per phase has been fabricated on silicon and implemented in a 5 MHz, 5-1 V, 4 A DC-DC converter. The coupled structure consists of four adjacent U-shaped copper windings sandwiched between two layers of NiFe. Electrical measurements match well with predictions for the converter.

Original languageEnglish
Pages (from-to)1343-1346
Number of pages4
JournalJournal of Magnetism and Magnetic Materials
Volume290-291 PART 2
DOIs
Publication statusPublished - Apr 2005

Keywords

  • Micro inductor
  • NiFe
  • Power converter
  • Thin films laminated

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