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Microfabrication of piezoelectric MEMS based on thick LiNbO3 single-crystal films

  • Merieme Ouhabaz
  • , Djaffar Belharet
  • , Quentin Micard
  • , Mario Costanza
  • , Giada Giuffrida
  • , Ausrine Bartasyte
  • , Carlo Trigona
  • , Samuel Margueron
  • University of Bourgogne Franche-Comté
  • Institut universitaire de France
  • University of Catania

Research output: Contribution to journal › Article › peer-review

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