Micromachining of a silicon multichannel microprobe for neural electrical activity recording

Carmen Moldovan; V. Ilian; Ghe Constantin; Rodica Iosub; M. Modreanu; Ioana Dinoiu; B. Firtat; C. Voitincu

doi:10.1016/S0924-4247(01)00901-3

Micromachining of a silicon multichannel microprobe for neural electrical activity recording

Carmen Moldovan
, V. Ilian
, Ghe Constantin
, Rodica Iosub
, M. Modreanu
, Ioana Dinoiu
, B. Firtat
, C. Voitincu

National Institute for Research and Development in Microtechnologies Romania

Research output: Contribution to journal › Article › peer-review

Abstract

The cellular potential recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an eight-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and externally psycho-electrical stimuli.

Original language	English
Pages (from-to)	119-124
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	99
Issue number	1-2
DOIs	https://doi.org/10.1016/S0924-4247(01)00901-3
Publication status	Published - 30 Apr 2002
Externally published	Yes

Keywords

Anisotropic etching
Design
Micromachining
Multichannel microprobe

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/S0924-4247(01)00901-3

Cite this

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title = "Micromachining of a silicon multichannel microprobe for neural electrical activity recording",

abstract = "The cellular potential recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an eight-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and externally psycho-electrical stimuli.",

keywords = "Anisotropic etching, Design, Micromachining, Multichannel microprobe",

author = "Carmen Moldovan and V. Ilian and Ghe Constantin and Rodica Iosub and M. Modreanu and Ioana Dinoiu and B. Firtat and C. Voitincu",

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T1 - Micromachining of a silicon multichannel microprobe for neural electrical activity recording

AU - Moldovan, Carmen

AU - Ilian, V.

AU - Constantin, Ghe

AU - Iosub, Rodica

AU - Modreanu, M.

AU - Dinoiu, Ioana

AU - Firtat, B.

AU - Voitincu, C.

PY - 2002/4/30

Y1 - 2002/4/30

N2 - The cellular potential recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an eight-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and externally psycho-electrical stimuli.

AB - The cellular potential recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an eight-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and externally psycho-electrical stimuli.

KW - Anisotropic etching

KW - Design

KW - Micromachining

KW - Multichannel microprobe

UR - https://www.scopus.com/pages/publications/0037197301

U2 - 10.1016/S0924-4247(01)00901-3

DO - 10.1016/S0924-4247(01)00901-3

M3 - Article

AN - SCOPUS:0037197301

SN - 0924-4247

VL - 99

SP - 119

EP - 124

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-2

ER -

Micromachining of a silicon multichannel microprobe for neural electrical activity recording

Abstract

Keywords

UN SDGs

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