Microstructural information from optical properties of LPCVD silicon films annealed at low temperature
- M. Gartner
- , M. Modreanu
- , C. Cobianu
- , R. Gavrila
- , M. Danila
- Institute of Physical Chemistry, Romanian Academy of Sciences
- National Institute for Research and Development in Microtechnologies Romania
- Valahia University of Targoviste
Research output: Contribution to journal › Article › peer-review