MOCVD of zirconia thin films by direct liquid injection using a new class of zirconium precursor
- Anthony C. Jones
- , Timothy J. Leedham
- , Peter J. Wright
- , Michael J. Crosbie
- , Penelope A. Lane
- , Dennis J. Williams
- , Kirsty A. Fleeting
- , David J. Otway
- , Paul O'Brien
- Inorgtech Limited
Research output: Contribution to journal › Article › peer-review