MOCVD of zirconia thin films by direct liquid injection using a new class of zirconium precursor
- A. C. Jones
- , T. J. Leedham
- , P. J. Wright
- , M. J. Crosbie
- , P. A. Lane
- , D. J. Williams
- , K. A. Fleeting
- , D. J. Otway
- , P. O'Brien
Research output: Contribution to journal › Article › peer-review