Modeling dopant diffusion in strained and strain-relaxed epi-SiGe

  • Yi Ming Sheu
  • , Tsung Yi Huang
  • , Yu Ping Hu
  • , Chih Chiang Wang
  • , Sally Liu
  • , Ray Duffy
  • , Anco Heringa
  • , Fred Roozeboom
  • , Nick E.B. Cowern
  • , Peter B. Griffin

Research output: Chapter in Book/Report/Conference proceedings › Chapter › peer-review

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