@article{8138e9ed6e174f49b0594396d4c650e5,
title = "Modeling the Atomic Layer Deposition of Metal Thin Films: Studying the Surface Reaction Mechanism By Density Functional Theory Simulations",
keywords = "Atomic layer deposition, Mechanism (biology), Density functional theory, Materials science, Metal, Deposition (geology), Layer (electronics), Thin film, Surface (topology), Chemical physics, Nanotechnology, Chemical engineering, Chemistry, Computational chemistry, Metallurgy, Physics, Geology, Geometry, Engineering, Quantum mechanics, Paleontology, Mathematics, Sediment",
author = "Ji Liu",
year = "2023",
doi = "10.1149/ma2023-02291499mtgabs",
language = "English",
journal = "Meeting Abstracts",
issn = "1091-8213",
}