Modelling and analysis of a magnetic microactuator

D. De Bhailís; C. Murray; M. Duffy; J. Alderman; G. Kelly; S. C. Ó Mathúna

doi:10.1016/S0924-4247(99)00176-4

Modelling and analysis of a magnetic microactuator

D. De Bhailís
, C. Murray
, M. Duffy
, J. Alderman
, G. Kelly
, S. C. Ó Mathúna

Tyndall IPES (Integrated Power)

University College Cork

Research output: Contribution to journal › Article › peer-review

Abstract

This paper describes the operation of a magnetic microactuator. A prototype device consisting of a Nd-Fe-B permanent magnet, a silicon membrane and an electroplated copper coil is used to verify models and to predict the deflection of the magnetic microactuator. The analysis of this device involves the investigation of its electromagnetic and mechanical behaviour using analytical methods and finite element analysis (FEA). A design procedure for a magnetic microactuator is also outlined. The prototype device was characterized and the measured results compared to the theoretical data. Results show that the deflection of the device may be predicted to an accuracy of 20%.

Original language	English
Pages (from-to)	285-289
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	81
Issue number	1
DOIs	https://doi.org/10.1016/S0924-4247(99)00176-4
Publication status	Published - 1 Apr 2000
Event	The 2nd European Magnetic Sensors and Actuators Conference (EMSA '98) - Sheffield, UK Duration: 13 Jul 1998 → 15 Jul 1998

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title = "Modelling and analysis of a magnetic microactuator",

abstract = "This paper describes the operation of a magnetic microactuator. A prototype device consisting of a Nd-Fe-B permanent magnet, a silicon membrane and an electroplated copper coil is used to verify models and to predict the deflection of the magnetic microactuator. The analysis of this device involves the investigation of its electromagnetic and mechanical behaviour using analytical methods and finite element analysis (FEA). A design procedure for a magnetic microactuator is also outlined. The prototype device was characterized and the measured results compared to the theoretical data. Results show that the deflection of the device may be predicted to an accuracy of 20\%.",

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T1 - Modelling and analysis of a magnetic microactuator

AU - De Bhailís, D.

AU - Murray, C.

AU - Duffy, M.

AU - Alderman, J.

AU - Kelly, G.

AU - Ó Mathúna, S. C.

PY - 2000/4/1

Y1 - 2000/4/1

N2 - This paper describes the operation of a magnetic microactuator. A prototype device consisting of a Nd-Fe-B permanent magnet, a silicon membrane and an electroplated copper coil is used to verify models and to predict the deflection of the magnetic microactuator. The analysis of this device involves the investigation of its electromagnetic and mechanical behaviour using analytical methods and finite element analysis (FEA). A design procedure for a magnetic microactuator is also outlined. The prototype device was characterized and the measured results compared to the theoretical data. Results show that the deflection of the device may be predicted to an accuracy of 20%.

AB - This paper describes the operation of a magnetic microactuator. A prototype device consisting of a Nd-Fe-B permanent magnet, a silicon membrane and an electroplated copper coil is used to verify models and to predict the deflection of the magnetic microactuator. The analysis of this device involves the investigation of its electromagnetic and mechanical behaviour using analytical methods and finite element analysis (FEA). A design procedure for a magnetic microactuator is also outlined. The prototype device was characterized and the measured results compared to the theoretical data. Results show that the deflection of the device may be predicted to an accuracy of 20%.

UR - https://www.scopus.com/pages/publications/0033903136

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DO - 10.1016/S0924-4247(99)00176-4

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SN - 0924-4247

VL - 81

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EP - 289

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1

T2 - The 2nd European Magnetic Sensors and Actuators Conference (EMSA '98)

Y2 - 13 July 1998 through 15 July 1998

ER -

Modelling and analysis of a magnetic microactuator

Abstract

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