Abstract
This paper provides a review of the use of simulation tools in the design process. It provides examples of applications where such tools can be effective in improving device functionality, yield, manufacturability and reliability. Topics covered are numerical process and device simulation, electromigration and stress migration simulation as well as circuit simulation and reliability modelling. Specific example of how such simulators work are provided and examples of currently available software tools are reviewed.
| Original language | English |
|---|---|
| Pages (from-to) | 95-117 |
| Number of pages | 23 |
| Journal | Microelectronic Engineering |
| Volume | 49 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Nov 1999 |
| Event | Proceedings of the 1999 3rd Session 'Reliability in VLSI Circuits : Operation, Manufacturing and Design' - MIGAS '99 - Autrans, France Duration: 28 Jun 1999 → 4 Jul 1999 |
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