Abstract
A system level model of a force balance accelerometer in which the proof mass is levitated with electrostatic forces is presented. The position of the proof mass is detected capacitively and controlled electrostatically. The mathematical modelling of the system is described. In particular, equations for the capacitances and electrostatic forces are derived and verified by comparison with a finite element model. They are then implemented in a Simulink system level model of the accelerometer.
| Original language | English |
|---|---|
| Pages (from-to) | 495-503 |
| Number of pages | 9 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 12 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Jul 2002 |
| Externally published | Yes |
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