Monolithic integration of refractive lenses with vertical-cavity lasers and detectors for optical interconnections

  • Eva M. Strzelecka
  • , G. B. Thompson
  • , Gerald D. Robinson
  • , Matthew G. Peters
  • , Brian J. Thibeault
  • , Mark Mondry
  • , Vijay Jayaraman
  • , Frank H. Peters
  • , Larry A. Coldren

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

We present a technique for monolithic integration of vertical cavity lasers and detectors with refractive microlenses etched on the back side of the semiconductor substrate in a wafer-scale process. This integration provides collimated or focused laser beam sources for applications in free-space interconnections or for coupling to optical fibers, and it improves the collection efficiency of detectors.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsMichael R. Feldman, Yung-Cheng Lee
Pages43-53
Number of pages11
Publication statusPublished - 1996
Externally publishedYes
EventOptoelectronic Packaging - San Jose, CA, USA
Duration: 1 Feb 19962 Feb 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2691
ISSN (Print)0277-786X

Conference

ConferenceOptoelectronic Packaging
CitySan Jose, CA, USA
Period1/02/962/02/96

Fingerprint

Dive into the research topics of 'Monolithic integration of refractive lenses with vertical-cavity lasers and detectors for optical interconnections'. Together they form a unique fingerprint.

Cite this