Nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers for MEMS applications
- C. Chima-Okereke
- , M. J. Reece
- , A. J. Bushby
- , R. W. Whatmore
- , Q. Zhang
- Queen Mary University of London
- Cranfield University
Research output: Contribution to journal › Article › peer-review