TY - JOUR
T1 - Nanowire transistors without junctions
AU - Colinge, Jean Pierre
AU - Lee, Chi Woo
AU - Afzalian, Aryan
AU - Akhavan, Nima Dehdashti
AU - Yan, Ran
AU - Ferain, Isabelle
AU - Razavi, Pedram
AU - O'Neill, Brendan
AU - Blake, Alan
AU - White, Mary
AU - Kelleher, Anne Marie
AU - McCarthy, Brendan
AU - Murphy, Richard
PY - 2010/3
Y1 - 2010/3
N2 - All existing transistors are based on the use of semiconductor junctions formed by introducing dopant atoms into the semiconductor material. As the distance between junctions in modern devices drops below 10nm, extraordinarily high doping concentration gradients become necessary. Because of the laws of diffusion and the statistical nature of the distribution of the doping atoms, such junctions represent an increasingly difficult fabrication challenge for the semiconductor industry. Here, we propose and demonstrate a new type of transistor in which there are no junctions and no doping concentration gradients. These devices have full CMOS functionality and are made using silicon nanowires. They have near-ideal subthreshold slope, extremely low leakage currents, and less degradation of mobility with gate voltage and temperature than classical transistors.
AB - All existing transistors are based on the use of semiconductor junctions formed by introducing dopant atoms into the semiconductor material. As the distance between junctions in modern devices drops below 10nm, extraordinarily high doping concentration gradients become necessary. Because of the laws of diffusion and the statistical nature of the distribution of the doping atoms, such junctions represent an increasingly difficult fabrication challenge for the semiconductor industry. Here, we propose and demonstrate a new type of transistor in which there are no junctions and no doping concentration gradients. These devices have full CMOS functionality and are made using silicon nanowires. They have near-ideal subthreshold slope, extremely low leakage currents, and less degradation of mobility with gate voltage and temperature than classical transistors.
UR - https://www.scopus.com/pages/publications/77949275137
U2 - 10.1038/nnano.2010.15
DO - 10.1038/nnano.2010.15
M3 - Article
AN - SCOPUS:77949275137
SN - 1748-3387
VL - 5
SP - 225
EP - 229
JO - Nature Nanotechnology
JF - Nature Nanotechnology
IS - 3
ER -