Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen; David Felix; Sang Ki Park; Paul Hauser; Brendan McCarthy; Dror Sarid; Christian Poweleit; Jose Menendez; Tom Milster

doi:10.1117/12.557055

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen
, David Felix
, Sang Ki Park
, Paul Hauser
, Brendan McCarthy
, Dror Sarid
, Christian Poweleit
, Jose Menendez
, Tom Milster

Research output: Contribution to journal › Article › peer-review

Abstract

A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

Original language	English
Pages (from-to)	634-641
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5380
DOIs	https://doi.org/10.1117/12.557055
Publication status	Published - 2004
Externally published	Yes
Event	Optical Data Storage 2004 - Monterey, CA, United States Duration: 18 Apr 2004 → 21 Apr 2004

Keywords

Microscopy
Near-field
Optical data storage
Solid immersion lens

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10.1117/12.557055

Cite this

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title = "Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design",

abstract = "A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.",

keywords = "Microscopy, Near-field, Optical data storage, Solid immersion lens",

author = "Tao Chen and David Felix and Park, \{Sang Ki\} and Paul Hauser and Brendan McCarthy and Dror Sarid and Christian Poweleit and Jose Menendez and Tom Milster",

year = "2004",

doi = "10.1117/12.557055",

language = "English",

volume = "5380",

pages = "634--641",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Optical Data Storage 2004 ; Conference date: 18-04-2004 Through 21-04-2004",

}

TY - JOUR

T1 - Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

AU - Chen, Tao

AU - Felix, David

AU - Park, Sang Ki

AU - Hauser, Paul

AU - McCarthy, Brendan

AU - Sarid, Dror

AU - Poweleit, Christian

AU - Menendez, Jose

AU - Milster, Tom

PY - 2004

Y1 - 2004

N2 - A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

AB - A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

KW - Microscopy

KW - Near-field

KW - Optical data storage

KW - Solid immersion lens

UR - https://www.scopus.com/pages/publications/10044264688

U2 - 10.1117/12.557055

DO - 10.1117/12.557055

M3 - Article

AN - SCOPUS:10044264688

SN - 0277-786X

VL - 5380

SP - 634

EP - 641

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Data Storage 2004

Y2 - 18 April 2004 through 21 April 2004

ER -

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Abstract

Keywords

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