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Near-field solid immersion lens (SIL) microscope

  • Tao Chen
  • , David Felix
  • , Sang Ki Park
  • , Brendan McCarthy
  • , Dror Sarid
  • , Tom Milster

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

A near-field solid immersion lens (SIL) microscope is developed for a standard microscope. With white-light incoherent illumination, the resolution of this system for observing DVDs pits is around 200nm with an effective NA of 1.5.

Original languageEnglish
Title of host publicationFrontiers in Optics, FiO 2005
PublisherOptical Society of America (OSA)
ISBN (Print)1557527970, 9781557527974
DOIs
Publication statusPublished - 2005
Externally publishedYes
EventFrontiers in Optics, FiO 2005 - Tucson, AZ, United States
Duration: 16 Oct 200521 Oct 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceFrontiers in Optics, FiO 2005
Country/TerritoryUnited States
CityTucson, AZ
Period16/10/0521/10/05

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