Near infrared diode laser in situ monitoring and control of chemical vapour deposition processes

Research output: Contribution to journal › Article › peer-review

Cite this

@article{d92c9f55844a4179bf155de63cbf5f39,

title = "Near infrared diode laser in situ monitoring and control of chemical vapour deposition processes",

author = "Philipp Martin and Robert Holdsworth and Martin Davis and Martyn Pemble and David Sheel",

year = "2002",

language = "English (Ireland)",

pages = "201--210",

journal = "Chemical Society Reviews",

issn = "0306-0012",

publisher = "Royal Society of Chemistry",

number = "4",

}