@inproceedings{d56c0b10b42148428c9ad3b6dc521e3b,
title = "Non-contact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy",
abstract = "An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 μm continuous range optical height measurement sensor used to characterize a 2.3 μm height Indium Phosphide twin square optical waveguide chip.",
keywords = "Confocal microscopy, Height measurements, Instrumentation, measurement, and metrology, Liquid crystals, Scanning microscopy",
author = "Riza, \{Nabeel A.\} and Khan, \{Sajjad A.\} and Mumtaz Sheikh",
year = "2007",
doi = "10.1117/12.717834",
language = "English",
isbn = "0819466948",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III",
note = "Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III ; Conference date: 09-04-2007 Through 10-04-2007",
}