Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOIs	https://doi.org/10.1116/1.4768681
Publication status	Published - 2013

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title = "Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors",

author = "Ailbe O'Manachain",

year = "2013",

doi = "10.1116/1.4768681",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena",

}

TY - JOUR

T1 - Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

AU - O'Manachain, Ailbe

PY - 2013

Y1 - 2013

U2 - 10.1116/1.4768681

DO - 10.1116/1.4768681

M3 - Article

JO - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

JF - Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

ER -