Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

Enrique Miranda; David Jiménez; Jordi Suñé; Eamon O'Connor; Scott Monaghan; Ian Povey; Karim Cherkaoui; Paul Kennedy Hurley

Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

Enrique Miranda
, David Jiménez
, Jordi Suñé
, Eamon O'Connor
, Scott Monaghan
, Ian Povey
, Karim Cherkaoui
, Paul Kennedy Hurley

Tyndall MicroNano Systems

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science & Technology B
Publication status	Published - 2013

Cite this

@article{f2743fbe42894b78a0dbd19c90ed7eb8,

title = "Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors",

author = "Enrique Miranda and David Jim{\'e}nez and Jordi Su{\~n}{\'e} and Eamon O'Connor and Scott Monaghan and Ian Povey and Karim Cherkaoui and Hurley, \{Paul Kennedy\}",

year = "2013",

language = "Undefined/Unknown",

journal = "Journal of Vacuum Science \& Technology B",

}

TY - JOUR

T1 - Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors

AU - Miranda, Enrique

AU - Jiménez, David

AU - Suñé, Jordi

AU - O'Connor, Eamon

AU - Monaghan, Scott

AU - Povey, Ian

AU - Cherkaoui, Karim

AU - Hurley, Paul Kennedy

PY - 2013

Y1 - 2013

M3 - Article

JO - Journal of Vacuum Science & Technology B

JF - Journal of Vacuum Science & Technology B

ER -