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Novel processing for access resistance reduction in Germanium devices

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

This paper reviews the experimental state-of-the-art in access resistance reduction in Ge devices. Special attention is paid to the doping and thermal annealing state-of-the-art, highlighting in particular those techniques that have been applied to Si devices, but have not yet been properly optimised in Ge. We also look forward to emerging novel processes for access resistance reduction.

Original languageEnglish
Title of host publication2014 International Workshop on Junction Technology, IWJT 2014
PublisherIEEE Computer Society
Pages155-160
Number of pages6
ISBN (Print)9781479936274
DOIs
Publication statusPublished - 2014
Event14th International Workshop on Junction Technology, IWJT 2014 - Shanghai, China
Duration: 18 May 201420 May 2014

Publication series

Name2014 International Workshop on Junction Technology, IWJT 2014

Conference

Conference14th International Workshop on Junction Technology, IWJT 2014
Country/TerritoryChina
CityShanghai
Period18/05/1420/05/14

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