Observation of peripheral charge induced low frequency capacitance-voltage behaviour in metal-oxide-semiconductor capacitors on Si and GaAs substrates

Ailbe O'Manachain

doi:10.1063/1.4729331

Observation of peripheral charge induced low frequency capacitance-voltage behaviour in metal-oxide-semiconductor capacitors on Si and GaAs substrates

Ailbe O'Manachain

Tyndall MicroNano Systems

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Applied Physics
DOIs	https://doi.org/10.1063/1.4729331
Publication status	Published - 2012

Access to Document

10.1063/1.4729331

Cite this

@article{c6979d87aa504f9eab116eb26f6a9ebf,

title = "Observation of peripheral charge induced low frequency capacitance-voltage behaviour in metal-oxide-semiconductor capacitors on Si and GaAs substrates",

author = "Ailbe O'Manachain",

year = "2012",

doi = "10.1063/1.4729331",

language = "Undefined/Unknown",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}