On the impact of buffer and GaN-channel thickness on current dispersion for GaN-on-Si RF/mmWave devices

  • V. Putcha
  • , L. Cheng
  • , A. Alian
  • , M. Zhao
  • , H. Lu
  • , B. Parvais
  • , N. Waldron
  • , D. Linten
  • , N. Collaert

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

The GaN-on-Si technology for the upcoming RF/6G/mm-Wave applications requires a robust buffer design for enhanced device performance and improved reliability. The defect states present in the various layers of the buffer stack can have a detrimental impact on both the DC and the AC performance of the device, as they can interact with the 2DEG channel carriers and/or contribute to buffer leakage mechanisms. An important reliability concern is the dynamic-RON, arising from the interaction of the 2DEG channel with the defects in the buffer stack and/or the defects in the barrier layer or barrier/cap interface. In this work, an improved and more robust current transient spectroscopy technique is used to extract the time constant spectra and the activation energies of various buffer defects. A thinner GaN channel layer is shown to increase the dynamic-RON, while a specific buffer stack configuration is shown to have a considerable impact the dynamic-RON.

Original languageEnglish
Title of host publication2021 IEEE International Reliability Physics Symposium, IRPS 2021 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728168937
DOIs
Publication statusPublished - Mar 2021
Externally publishedYes
Event2021 IEEE International Reliability Physics Symposium, IRPS 2021 - Virtual, Monterey, United States
Duration: 21 Mar 202124 Mar 2021

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
Volume2021-March
ISSN (Print)1541-7026

Conference

Conference2021 IEEE International Reliability Physics Symposium, IRPS 2021
Country/TerritoryUnited States
CityVirtual, Monterey
Period21/03/2124/03/21

Keywords

  • activation energy
  • buffer dispersion
  • current transient spectroscopy
  • dynamic-R
  • GaN
  • RF/6G applications

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