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On the mobility behavior in highly doped junctionless nanowire SOI MOSFETs

Research output: Chapter in Book/Report/Conference proceedingsConference proceedingpeer-review

Abstract

The electron mobility in highly-doped junctionless (JL) nanowire (NW) silicon-onisulator (SOI) MOSFETs with various nanowire widths is experimentally studied and analyzed. The evidence for the considerable enhancement of the effective electron mobility in narrow NW devices as compared to counterpart planar (wide) devices, having the same film thickness and doping, and as compared to the bulk silicon mobility with the same doping is presented. This mobility enhancement increases with decreasing the NW width. The reason for this effect is considered to be reduction of the impurity Coulomb scattering in narrow NW MOSFETs due to: (i) the reduced depletion-layer width; (ii) stronger screening of ionized impurities; (iii) the reduced number of neighbor ionized doping atoms per each free carrier in very narrow NWs. These results are of great importance since mobility degradation due to high doping was considered to be one of the most important limitations of the JL NW MOSFETs.

Original languageEnglish
Title of host publicationFunctional Nanomaterials and Devices VII
Pages35-43
Number of pages9
DOIs
Publication statusPublished - 2014
Event7th International Workshop on Functional Nanomaterials and Devices - Kyiv, Ukraine
Duration: 8 Apr 201311 Apr 2013

Publication series

NameAdvanced Materials Research
Volume854
ISSN (Print)1022-6680

Conference

Conference7th International Workshop on Functional Nanomaterials and Devices
Country/TerritoryUkraine
CityKyiv
Period8/04/1311/04/13

Keywords

  • Junctionless transistors
  • Mobility
  • Multi-gate MOSFETs
  • Silicon-on-insulator (SOI)

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