Optical characterization of high-k dielectrics HfO2 thin films obtained by MOCVD

  • M. Modreanu
  • , P. K. Hurley
  • , B. J. O'Sullivan
  • , B. O'Looney
  • , J. P. Senateur
  • , H. Rousell
  • , F. Rousell
  • , M. Audier
  • , C. Dubourdieu
  • , I. W. Boyd
  • , Q. Fang
  • , T. L. Leedham
  • , S. Rushworth
  • , A. C. Jones
  • , H. Davies
  • , C. Jimenez

Research output: Contribution to journal › Article › peer-review

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