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Optimisation and scaling of interfacial GeO 2 layers for high-k gate stacks on germanium and extraction of dielectric constant of GeO 2

  • S. N.Ali Murad
  • , D. W. McNeill
  • , S. J.N. Mitchell
  • , B. M. Armstrong
  • , M. Modreanu
  • , G. Hughes
  • , R. K. Chellappan
  • Queen's University Belfast
  • Dublin City University

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

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