Optimisation and scaling of interfacial GeO 2 layers for high-κ gate stacks on germanium and extraction of dielectric constant of GeO 2
- S. N.A. Murad
- , P. T. Baine
- , D. W. McNeill
- , S. J.N. Mitchell
- , B. M. Armstrong
- , M. Modreanu
- , G. Hughes
- , R. K. Chellappan
- Queen's University Belfast
- Dublin City University
Research output: Contribution to journal › Article › peer-review