@inbook{65520206ac0648158eea1b491d583af8,
title = "Optimisation, design and fabrication of a novel accelerometer",
abstract = "This paper presents the design and fabrication of an accelerometer which, as its proof mass, employs a mechanically unsupported disk. The disk is levitated electrostatically and sensing is achieved capacitively. The accelerometer is force balanced by incorporating the mechanical sensing element in a Sigma Delta (ΣΔ) modulator control system. Various electrode configurations are presented and optimised to ensure maximum pick-off signal. System level modelling results, comparing three and four electrode-group configurations, are presented and the fabrication process is discussed.",
keywords = "Accelerometers, Control systems, Design optimization, Electrodes, Etching, Fabrication, Feedback, Force control, Frequency, Springs",
author = "R. Houlihan and E. Koukharenko and H. Sehr and M. Kraft",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1217037",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1403--1406",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}
