Optimisation, design and fabrication of a novel accelerometer

R. Houlihan; E. Koukharenko; H. Sehr; M. Kraft

doi:10.1109/SENSOR.2003.1217037

Optimisation, design and fabrication of a novel accelerometer

R. Houlihan
, E. Koukharenko
, H. Sehr
, M. Kraft

University of Southampton

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

Abstract

This paper presents the design and fabrication of an accelerometer which, as its proof mass, employs a mechanically unsupported disk. The disk is levitated electrostatically and sensing is achieved capacitively. The accelerometer is force balanced by incorporating the mechanical sensing element in a Sigma Delta (ΣΔ) modulator control system. Various electrode configurations are presented and optimised to ensure maximum pick-off signal. System level modelling results, comparing three and four electrode-group configurations, are presented and the fabrication process is discussed.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1403-1406
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1217037
Publication status	Published - 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	8/06/03 → 12/06/03

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Accelerometers
Control systems
Design optimization
Electrodes
Etching
Fabrication
Feedback
Force control
Frequency
Springs

Access to Document

10.1109/SENSOR.2003.1217037

Cite this

Houlihan, R., Koukharenko, E., Sehr, H., & Kraft, M. (2003). Optimisation, design and fabrication of a novel accelerometer. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1403-1406). Article 1217037 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217037

Houlihan, R. ; Koukharenko, E. ; Sehr, H. et al. / Optimisation, design and fabrication of a novel accelerometer. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1403-1406 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{65520206ac0648158eea1b491d583af8,

title = "Optimisation, design and fabrication of a novel accelerometer",

abstract = "This paper presents the design and fabrication of an accelerometer which, as its proof mass, employs a mechanically unsupported disk. The disk is levitated electrostatically and sensing is achieved capacitively. The accelerometer is force balanced by incorporating the mechanical sensing element in a Sigma Delta (ΣΔ) modulator control system. Various electrode configurations are presented and optimised to ensure maximum pick-off signal. System level modelling results, comparing three and four electrode-group configurations, are presented and the fabrication process is discussed.",

keywords = "Accelerometers, Control systems, Design optimization, Electrodes, Etching, Fabrication, Feedback, Force control, Frequency, Springs",

author = "R. Houlihan and E. Koukharenko and H. Sehr and M. Kraft",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1217037",

language = "English",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1403--1406",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

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}

Houlihan, R, Koukharenko, E, Sehr, H & Kraft, M 2003, Optimisation, design and fabrication of a novel accelerometer. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1217037, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1403-1406, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 8/06/03. https://doi.org/10.1109/SENSOR.2003.1217037

Optimisation, design and fabrication of a novel accelerometer. / Houlihan, R.; Koukharenko, E.; Sehr, H. et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1403-1406 1217037 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedings › Conference proceeding › peer-review

TY - GEN

T1 - Optimisation, design and fabrication of a novel accelerometer

AU - Houlihan, R.

AU - Koukharenko, E.

AU - Sehr, H.

AU - Kraft, M.

PY - 2003

Y1 - 2003

N2 - This paper presents the design and fabrication of an accelerometer which, as its proof mass, employs a mechanically unsupported disk. The disk is levitated electrostatically and sensing is achieved capacitively. The accelerometer is force balanced by incorporating the mechanical sensing element in a Sigma Delta (ΣΔ) modulator control system. Various electrode configurations are presented and optimised to ensure maximum pick-off signal. System level modelling results, comparing three and four electrode-group configurations, are presented and the fabrication process is discussed.

AB - This paper presents the design and fabrication of an accelerometer which, as its proof mass, employs a mechanically unsupported disk. The disk is levitated electrostatically and sensing is achieved capacitively. The accelerometer is force balanced by incorporating the mechanical sensing element in a Sigma Delta (ΣΔ) modulator control system. Various electrode configurations are presented and optimised to ensure maximum pick-off signal. System level modelling results, comparing three and four electrode-group configurations, are presented and the fabrication process is discussed.

KW - Accelerometers

KW - Control systems

KW - Design optimization

KW - Electrodes

KW - Etching

KW - Fabrication

KW - Feedback

KW - Force control

KW - Frequency

KW - Springs

UR - https://www.scopus.com/pages/publications/84944741896

U2 - 10.1109/SENSOR.2003.1217037

DO - 10.1109/SENSOR.2003.1217037

M3 - Conference proceeding

AN - SCOPUS:84944741896

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 1403

EP - 1406

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Houlihan R, Koukharenko E, Sehr H, Kraft M. Optimisation, design and fabrication of a novel accelerometer. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1403-1406. 1217037. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1217037

Optimisation, design and fabrication of a novel accelerometer

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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