Orientation of cracks in AlGaN epilayers with sapphire substrates

R. T. Murray; P. J. Parbrook; D. A. Wood

doi:10.1023/A:1021806702155

Orientation of cracks in AlGaN epilayers with sapphire substrates

R. T. Murray
, P. J. Parbrook
, D. A. Wood

Research output: Contribution to journal › Article › peer-review

Abstract

The orientation of cracks in AlGaN epilayers with sapphire substrates was presented. The cracks were observed by Nomarski interference microscopy. To confirm the orientation deduced by optical microscopy, cross section Transmission electron microscopy samples were prepared by ion milling. It was found that the cracks lied along three directions rotated by 120°C relative to each other.

Original language	English
Pages (from-to)	113-114
Number of pages	2
Journal	Journal of Materials Science Letters
Volume	22
Issue number	2
DOIs	https://doi.org/10.1023/A:1021806702155
Publication status	Published - 15 Jan 2003
Externally published	Yes

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title = "Orientation of cracks in AlGaN epilayers with sapphire substrates",

abstract = "The orientation of cracks in AlGaN epilayers with sapphire substrates was presented. The cracks were observed by Nomarski interference microscopy. To confirm the orientation deduced by optical microscopy, cross section Transmission electron microscopy samples were prepared by ion milling. It was found that the cracks lied along three directions rotated by 120°C relative to each other.",

author = "Murray, \{R. T.\} and Parbrook, \{P. J.\} and Wood, \{D. A.\}",

year = "2003",

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AU - Parbrook, P. J.

AU - Wood, D. A.

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Y1 - 2003/1/15

N2 - The orientation of cracks in AlGaN epilayers with sapphire substrates was presented. The cracks were observed by Nomarski interference microscopy. To confirm the orientation deduced by optical microscopy, cross section Transmission electron microscopy samples were prepared by ion milling. It was found that the cracks lied along three directions rotated by 120°C relative to each other.

AB - The orientation of cracks in AlGaN epilayers with sapphire substrates was presented. The cracks were observed by Nomarski interference microscopy. To confirm the orientation deduced by optical microscopy, cross section Transmission electron microscopy samples were prepared by ion milling. It was found that the cracks lied along three directions rotated by 120°C relative to each other.

UR - https://www.scopus.com/pages/publications/0037440358

U2 - 10.1023/A:1021806702155

DO - 10.1023/A:1021806702155

M3 - Article

AN - SCOPUS:0037440358

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VL - 22

SP - 113

EP - 114

JO - Journal of Materials Science Letters

JF - Journal of Materials Science Letters

IS - 2

ER -

Orientation of cracks in AlGaN epilayers with sapphire substrates

Abstract

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