Packaging of 50 × 50 MEMS-actuated silicon photonics switching device

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

We report on the packaging of the 50 × 50 MEMS-actuated silicon photonics switching device through flip-chip assembly and a lidless 64-channel fibre array polished at 13° angle. The device, measuring 10 mm × 10 mm, contains more than 2500 bond pads with a dimension of 65 μm × 65 μm, with the actuating MEMS structures locating 15 μm away at 4 sides of each bond pads. An average switching voltage of 35 V recorded at package level complies with data recorded during device probing while fibre-to-grating coupler loss was measured to be 4.25dB / facet at around 1550nm.

Original languageEnglish
Title of host publicationProceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages245-249
Number of pages5
ISBN (Electronic)9781509043682
DOIs
Publication statusPublished - 21 Feb 2017
Event18th IEEE Electronics Packaging Technology Conference, EPTC 2016 - Singapore, Singapore
Duration: 30 Nov 20163 Dec 2016

Publication series

NameProceedings of the 2016 IEEE 18th Electronics Packaging Technology Conference, EPTC 2016

Conference

Conference18th IEEE Electronics Packaging Technology Conference, EPTC 2016
Country/TerritorySingapore
CitySingapore
Period30/11/163/12/16

Keywords

  • data centre
  • interposer
  • MEMS
  • optical switch
  • silicon photonic packaging

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