Packaging strategies for 3D integration of Photonic and Electronic chips on a Glass substrate

  • Robert Bernson
  • , Saif Wakeel
  • , Parnika Gupta
  • , Luigi Ranno
  • , Drew Weninger
  • , Anuradha Agarwal
  • , Samuel Serna
  • , Juejun Hu
  • , Kamil Gradkowski
  • , Lionel Kimerling
  • , Peter O'Brien

Research output: Chapter in Book/Report/Conference proceedingsChapterpeer-review

Abstract

3D printed free-form couplers and inverse tapers are two different vertical integration strategies for coupling light between a PIC and glass interposer. For the free-form coupling scheme, 5×5×0.5 mm3 dummy silicon dies are bonded to a glass substrate using solder bumps via flip-chip bonding. The gap distance between the bonded chips is controlled by the solder height based on various bond pad sizes. An array of 14×14 square gold bond pads on the silicon chip is used with the bond pad length varying from 50 μm to 105 μm in order to maintain a required height. SAC305 solder is jetted onto the bond pads and an optimization of the reflow profile is performed to achieve defect-free, and high-wetting solder bumps. For the inverse taper coupling approach, the PIC is bonded to glass using a UV-curable optical epoxy (n=1.5). The measured vertical distance falls within the 2.8 μm required Z-tolerance for evanescent coupling according to simulation.

Original languageEnglish
Title of host publicationProceedings of the 25th Electronics Packaging Technology Conference, EPTC 2023
EditorsAndrew Tay, King Jien Chui, Yeow Kheng Lim, Chuan Seng Tan, Sunmi Shin
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages804-808
Number of pages5
ISBN (Electronic)9798350329575
DOIs
Publication statusPublished - 2023
Event25th Electronics Packaging Technology Conference, EPTC 2023 - Singapore, Singapore
Duration: 5 Dec 20238 Dec 2023

Publication series

NameProceedings of the 25th Electronics Packaging Technology Conference, EPTC 2023

Conference

Conference25th Electronics Packaging Technology Conference, EPTC 2023
Country/TerritorySingapore
CitySingapore
Period5/12/238/12/23

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