Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

Noel Kennedy; Ray Duffy; Luke Eaton; Dan O’Connell; Scott Monaghan; Shane Garvey; James Connolly; Chris Hatem; Justin D Holmes; Brenda Long

Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

Noel Kennedy
, Ray Duffy
, Luke Eaton
, Dan O’Connell
, Scott Monaghan
, Shane Garvey
, James Connolly
, Chris Hatem
, Justin D Holmes
, Brenda Long

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Beilstein Journal of Nanotechnology
Publication status	Published - 2018

Cite this

@article{52de675cbb3744b9ac28386f8ea45efc,

title = "Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates",

author = "Noel Kennedy and Ray Duffy and Luke Eaton and Dan O{\textquoteright}Connell and Scott Monaghan and Shane Garvey and James Connolly and Chris Hatem and Holmes, \{Justin D\} and Brenda Long",

year = "2018",

language = "Undefined/Unknown",

journal = "Beilstein Journal of Nanotechnology",

issn = "2190-4286",

publisher = "Beilstein-Institut Zur Forderung der Chemischen Wissenschaften",

}

TY - JOUR

T1 - Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

AU - Kennedy, Noel

AU - Duffy, Ray

AU - Eaton, Luke

AU - O’Connell, Dan

AU - Monaghan, Scott

AU - Garvey, Shane

AU - Connolly, James

AU - Hatem, Chris

AU - Holmes, Justin D

AU - Long, Brenda

PY - 2018

Y1 - 2018

M3 - Article

SN - 2190-4286

JO - Beilstein Journal of Nanotechnology

JF - Beilstein Journal of Nanotechnology

ER -