Photo-induced CVD of tantalum pentoxide dielectric films using an injection liquid source
- J. Y. Zhang
- , I. W. Boyd
- , M. B. Mooney
- , P. K. Hurley
- , B. J. O'Sullivan
- , J. T. Beechinor
- , P. V. Kelly
- , G. M. Crean
- , J. P. Senateur
- University College London
- Institut polytechnique de Grenoble
- SAINT MARTIN d'Heres CEDEX
Research output: Contribution to journal › Article › peer-review